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IDE System Control Software for Accurate and Reliable Measurement
 Image Display
Mechanical Control
Waveform Acquisition
Image Display
In many device analysis systems today, the most valuable data is in the image. SEMs, e-beam probers, FIB systems, emission microscopes and optical microscopes all fall into this image-based category. The image must be captured, but the methods for doing so are frequently time-consuming and costly. Instant photography is often used, while in other cases ad hoc electronic capture hardware is employed.
The IDE system standardizes on capture hardware which accepts a variety of video signals and stores all images in standard formats that can be shared across systems. Images are also displayed in real time, on the same high-resolution monitor as the IDE software, to allow easy and meaningful pan-and-zoom control in the context of the device image.
Mechanical Control
The IDE control software can control the position of the optics, device or wafer stage, and any number of probes. The software automatically compensates for the different X/Y/Z orientations of the various mechanical subsystems and moves each at the highest hardware resolution and accuracy. Once aligned, collision-avoidance and touchdown-sensing hardware and software prevent damage to sensitive probe tips die surfaces and delicate mechanical components.
Waveform Acquisition
Most of the activity in a device analysis lab is centered on waveform acquisition and interpretation. Logic and analog waveforms are captured from a variety of probers and bench top instruments and then stored using instant photography, local printers or electronic storage in proprietary formats. IDE software communicates with these instruments Using the standard IEEE-488 interface, displays real-time waveforms on the same high-resolution monitor and stores the data in common interchangeable formats. Waveforms can also be easily incorporated into report documents.
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