Schlumberger
Automated
Test Equipment
IDS 10000plus ProbeSystem
Product Details
Specifications
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IDS 10000plus ProbeSystem
| SPECIFICATIONS |
| Optics |
|
| Electron Source |
TFE |
| Beam Current |
>15nA@0.1µm |
| Beam Energy |
TFE |
| Pulse Width |
50ps to 1µs |
| Vacuum System |
3-stage differential pumping |
| Gun Pressure |
10-9 Torr |
Waveforms |
|
| Voltage Display |
20mV/div to 10V/div |
| Voltage Resolution |
<50mV |
| Ultimate Noise |
<5mV-rms |
| Time Display |
50ps/div to 100µs/div |
| Bandwidth |
>7GHz |
| Jitter |
<30ps-rms |
| Triggering |
Standard, Clock Sync |
| Timebase Resolution |
l0ps |
Imaging |
|
| Probe Position |
Automatic tracking |
| Focus and Astigmatism |
Automated |
| Image Modes |
Realtime, Frame and Stroboscopic |
Chamber |
|
| Stage Travel |
5Omm x 50mm |
| Stage Resolution |
0.1µm |
| Fixturing |
Supports all IDS load modules and kinematic mounts |
Control |
|
| Workstation |
Sun SPARCstation
1152 x 000 pixel color display, 1/4in tape drive, CD-ROM |
| Interfaces |
Ethernet RS-232 |
Software |
|
| Operating system |
SunOS and Motif or Openwindows |
| Database Processing |
Cadence LVS |
| Layout formats |
GDSII, Apple 860, CIP |
| Netlist Formats |
EDIF Logis, Silos, Spice, Tegas |
| Schematic Format |
EDIF |
| Cross-Reference Format |
SCIF |
|
