IDS 10000plus ProbeSystem
TFE Electron Source
 Fast Waveform Acquisition
Long Test Patterns
High Bandwidth
High Accuracy AC Probing
Large Complex Devices
Tester Interface
The IDS 10000plus includes the highest performance electron source available in an electron-beam probe system. The zirconiated/tungsten, Shottky-effect TFE source supplies over 15nA of beam current at 0.lmm resolution. This source has been integrated into a unique electron gun assembly that allows stable and continuous operation for over six months with minimal user adjustments.
Fast Waveform Acquisition
The IDS 10000plus is designed to improve productivity by reducing waveform acquisition times with the same non-loading probe as current generation electron-beam probers. Waveforms are acquired in a matter of seconds compared to several minutes on current generation probers, and additionally it is now practical to acquire waveforms that were previously impossible to measure.
Long Test Patterns
Complex devices have increasingly long test patterns which have made waveform acquisition unbearably long or have required extensive manual intervention to reduce the test vectors to the smallest consistent set. The enhanced waveform acquisition of the IDS 10000plus allows the use of unmodified test patterns for the most demanding applications.
For long test patterns the effect of tester clock jitter may significantly limit the bandwidth of the probing environment. The lDS 10000plus time-base includes a Clock Sync circuit which allows synchronization to the device dock to eliminate these errors. High accuracy waveforms can now be acquired throughout the test pattern without the need to manually change the trigger point in the test program.
High Bandwidth
The l5nA of beam current of the IDS 10000plus allows operation at narrower beam pulses for increased timing resolution. The high beam current density coupled with a 50ps beam pulse width delivers waveform acquisition at extremely low noise levels. This allows bandwidth measurements of over 7GHz.
High Accuracy AC Probing
The completely re-designed IDS 10000plus energy analyzer provides unprecedented 5mV amplitude resolution. The high selectivity and sharp transfer function of this new energy analyzer coupled with the fast waveform acquisition, allows voltage differences of 50mV or 1ess to be routinely measured.
Large Complex Devices
The stage movement of the IDS 10000plus has been increased to 50mm by 50mm and image analysis algorithms have been developed to allow automated probe placement on the narrowest conductors of small geometry circuits. Additional integrated software features, such as GFE Compensation and Probe Tracking automate probe placement corrections to ensure the stability of critical probe measurements on submicron devices.
Tester Interface
The IDS 10000plus tester interface is designed for high speed direct docking with most production and engineering testers. Temperature control and options for wafer probing are also available.
Full Compatibility
The IDS 10000plus can use the full range of IDS load modules, fixturing options and wafer lids: It also supports image waveform and CAD formats from previous IDS systems as well as software productivity enhancement options such as DA and IFA.
| Features |
Benefits |
Thermal Field Emission
Electron Source |
Twenty times faster acquisition for greater
productivity; long source life |
| Innovative Spectrometer |
Superior voltage resolution for critical AC measurements |
| 50ps Beam Blanker |
Ultra high bandwidth for precise timing analysis |
High Accuracy Timebase
and Clock Sync |
Ability to support long test vector applications |
| Extended Movement Stage |
Probing of large and complex dies |
| GFE Compensation and Probe Tracking |
Automated correction to ensure the stability of submicron device probing |
|
