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IDS IFA: Image-Based Failure Analysis Tool
IDS Batchprobe
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IDS Batchprobe
Automated Waveform Acquisition Tool
- Fully automated waveform acquisition for IDS electron beam probe systems
- Allows IDS system utilization during off-hours
- Controls IDS SEM, Scope and Layout tools
- Automatic placement and alignment of the SEM probe
- Device characterization process can be automated
- Optional remote tester control interface
The IDS BatchProbe option provides automated waveform acquisition capability for IDS E-beam probe Systems. BatchProbe automates the SEM probe placement and waveform acquisition process by taking control of the IDS SEM Tool, Layout Tool and Scope Tool. Probe placement is accomplished using advanced image recognition and alignment algorithms.
BatchProbe extends the amount of time that the IDS E-beam probe system may be used by providing automatic waveform acquisition during hours when the system would normally be idle.
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