Schlumberger
Automated
Test Equipment
Verification Systems
IVS 120
IVS 220
Home
Site Index
|
 |
IVS 220
Critical Dimension Scanning Electron Microscope System
The advanced electron optics and automation of the IVS 220 provide fully automated critical dimension measurements of semiconductor features as small as 100nm with excellent precision. A unique pattern recognition system provides success rates >99%, which allows for in-circuit measurement of lines, spaces, contact holes and vias. Thin-film head manufacturers also benefit from the system's ability to measure high aspect ratio top pole structures and MR read head features.
|
