| SPECIFICATIONS |
| Control Computer |
|
| Workstation |
Sun SparcStation
19in , 1152 x 900 pixel
color display |
Software |
|
| Operating system |
UNIX |
| Mechanical probes |
MPC tool |
| Layout formats |
GDSII stream , CIF, APPLE 860 |
Invisible features
location tools |
Layout Overlay
Large Area Overlay
Image Overlay |
Specimen Chamber and Column Stage |
|
| Column stage movement |
50 x 50 mm |
| Blind navigation error |
± 0.2 microns over 500 micron area |
| Specimen stage |
IDS packaged part load modules
Precision 80mm specimen tilt stage |
| Tilt |
0 - 55 degrees tilt (optional) |
| Tilt tracking |
Software eucentric |
Mechanical Probes in Chamber |
|
| Number of probes |
Up to 3 independent stages. Standard
configuration includes 1 stage.
Passive and active probes available in
any combination. |
| Probe movement |
25mm (X,Y)
10mm Z |
| Stage resolution |
Coarse mode 0.4 microns
Fine mode 0.02 microns |
| Probe types |
GGB picoprobe 7A standard passive
probe 7,12C, 34A (optional)
(SMA connectors) |
| Tip radius |
all types >0.2 microns |
Beam and Gas Parameters |
|
| Ion source |
LMIS with 2-lens focusing column |
| Beam currents |
Electronic infinitely variable aperture
5pA-6nA |
| Beam energy |
5KeV to 30KeV |
| Deposition material |
Conductor and insulator |
| Halogen gases |
Metal and dielectric preferential |
Imaging |
|
| Maximum field of view |
5mm square area |
| Minimum field of view |
1 micron square area |
Power Requirements |
|
| Voltage |
200, 208, 220, 240 Volts
AC single phase |
| Current |
30 A |
| Frequency |
50Hz or 60Hz |
